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    Home > Technology > Clean Environments > Aviza 6M Class 1,000 Clean Room

Aviza 6M Class 1,000 Clean Room

  • « Aviza B-4 Class 10 Clean Room |
  • Computer History Museum Tenant Improvement »

This 5,000 SF clean room is 24’ wide and 208’ long. The raised floor is 30” to 52” high to allow return air flow to get through the under floor gas, vacuum piping.

The room is set up to allow new tools to move in and out without dismantling another tool.

  • « Aviza B-4 Class 10 Clean Room |
  • Computer History Museum Tenant Improvement »
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